For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP

- Long service life: 3 million cycles (within standard temperature range)
- Low particle generation: Reduced by 1/5 or more (compared with the existing product)
- Easier maintenance
- Easy replacement of bellows
- Gate can be replaced from above. (Made to order)
- Safety measures
- A mechanical end lock mechanism has been adopted.
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Wireless System EXW1/EX600-W

- Modbus TCP and SLMP have been added to the compact type EXW1 series [New]
- Applicable to DIN rail mounting to the compact type EXW1 series.
- Standby regulator+Digital flow switch
- Noise resistance
- Uses the 2.4 GHz ISM frequency band
- Frequency hopping: Every 2 ms (Fastest)
- Communication cables not required
- Reduced wiring work, space, and cost
- Minimized disconnection risk
- Provides communication stability in FA environments
- Compact and lightweight (EXW1)
- Volume: Approx. 81% reduction, Weight: Approx. 79% reduction
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Pocket Leak Detector PLD

Detect Air Leaks Instantly — Anytime, Anywhere
The PLD Series Pocket Leak Detector empowers maintenance and production teams to quickly identify compressed air leaks with speed, accuracy, and ease—supporting SMC’s commitment to energy efficiency and sustainable operations.
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